EFRE-Support for the Microsystems Lab
02.12.2024 -
We are happy to have received the official confirmation for support by the European Regional Development Fund to purchase new equipment for the microsystems laboratory -- just in time for the year-end season. This is an important step in the modernization and consolidation of the lab to the needs of your research topics and our innovation philosophy and relieves the greatest material worries in being able to realize our research program.
Our future deposition machine with different sputter- and evaporation sources enables us to deposit a wide spectrum of metals and dielectrics in varying composition over a wide spectrum of layer thicknesses -- both economically and ecologically sustainably. In addition, we will be able to deposit parylene to create ultra-thin conformal isolation and protection layers and diffusion barriers. Or structuring capabilities will be greatly enhanced with a new 5-axes micro mill to create sub-mm mechanical and fluidic structures and molds. In addition, we will be able to add another wavelength to our laser-structuring system for material-selective laser ablation on the µm-scale. Similarly, we will be able to add a new laser-vibrometer measurement head to out custom modular surface profilometer to map out ultrasonic vibrations. Finally, a new plasma oven will provide surface cleaning and activation, e.g., for plasma bonding.
Photo: GregMontani, Pixabay